https://doi.org/10.3365/KJMM.2026.64.3.253
선신희(Shin Hui Seon) ; 임채연(Chae Yeon Lim) ; 김현식(Hyun Sik Kim) ; 정재필(Jae Pil Jung)
This review focuses on TSV-based bumpless hybrid bonding for AI semiconductors, covering metal passivation layers (Pt, Au, Ag, etc.) and surface activation techniques.