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A Study on Ceramic Heater Devices Based on Si<sub>3</sub>N<sub>4</sub> with a MoO<sub>3</sub> Protective Layer
MoO3 보호막 적층 Si3N4 기반 세라믹 히터 소자 연구
Yong Min Jeon, Si Hong Ryu, Seon Ho Kim, Seong Eui Lee
전용민, 유시홍, 김선호, 이성의
Korean J. Met. Mater. 2022;60(4):301-306.   Published online 2022 Mar 28
DOI: https://doi.org/10.3365/KJMM.2022.60.4.301

Abstract
Currently, the need for high performance heaters for industrial application is increasing, and repeated wear, rapid temperature change, and uneven temperature can cause deteriorating quality and reduced productivity. The ceramic heater in this study consists of a substrate, an electrode layer, and a protective layer, and low-melting temperature glass frit..... More

                
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