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Korean Journal of Metals and Materials > Volume 58(1); 2020 > Article
Korean Journal of Metals and Materials 2020;58(1): 26-31. doi: https://doi.org/10.3365/KJMM.2020.58.1.26
나노-마이크로 패턴의 형성에 미치는 기판의 표면 거칠기 영향
박태완1, 변명환3, 정현성1, 박운익2
1한국세라믹기술원전자융합본부
2부경대학교재료공학과
3계명대학교신소재공학과
Effect of Surface Roughness on the Formation of Nano-to-Mirco Patterns Using Pattern Transfer Printing
Tae Wan Park1, Myunghwan Byun3, Hyunsung Jung1, Woon Ik Park2
1Electronic Convergence Division, Korea Institute of Ceramic Engineering & Technology (KICET), Jinju 52851, Republic of Korea
2Department of Materials Science and Engineering, Pukyong National University, Pusan 48513, Republic of Korea
3Department of Materials Engineering, Keimyung University, Daegu 42601, Republic of Korea
Correspondence  Woon Ik Park ,Tel: +82-51-629-6355, Email: thane0428@gmail.com
Received: 17 October 2019;  Accepted: 26 November 2019.  Published online: 12 December 2019.
*Tae Wan Park and Myunghwan Byun contributed equally to this work.
ABSTRACT
The ability to form high quality nano-/micro- patterns is very important for the nanofabrication of high-density electronic devices. However, remaining challenges have yet to be resolved, including low quality roughness, low pattern resolution, and the highly complex process. In this study, we suggest a novel and simple method for creating high quality patterns, controlling the surface roughness of the target substrates with a polishing process. We systematically investigated the effect of surface roughness on pattern generation, using a nanotransfer printing (nTP) process on target Al2O3 substrates. We successfully formed highly ordered nanoscale functional patterns on well-defined surfaces, using a mirror-polishing process, compared to normally-polished substrates. In addition, we demonstrated well-printed Sn nanopatterns on various metal (Cu and Fe) substrates. Close-up scanning electron microscope (SEM) images clearly show welldefined patterns on the mirror-polished substrates. Based on these results, we expect that by mechanically modifying substrate surfaces, the yield and quality of pattern formation can be improved, and that this approach can be extended to other patterning methods.
Keywords: surface modification, polishing, nanotransfer printing
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