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Korean Journal of Metals and Materials > Volume 56(3); 2018 > Article
Korean Journal of Metals and Materials 2018;56(3): 197-204. doi: https://doi.org/10.3365/KJMM.2018.56.3.197
흑연 및 Mo 기판 위에 CVD 성장된 Re 코팅층의 미세조직
이선규1, 남동윤1, 배남호2, 임성택3, 오용준1
1한밭대학교 신소재공학과
2나노종합기술원
3국방과학연구소
Microstructure of Rhenium Coatings Deposited by CVD on Graphite and Mo Substrates
Sun Kyu Lee1, Dong Yun Nam1, Nam Ho Bae2, Sung Taek Lim3, Yong-Jun Oh1
1Dept. Materials Science and Engineering, Hanbat National University, Daejeon 34158, Republic of Korea
2National Nanofab Center, Daejeon 34141, Republic of Korea
3Agency of Defense Development, Daejeon 34186, Republic of Korea
Correspondence  Yong-Jun Oh ,Tel: +82-42-821-1236, Email: yjoh@hanbat.ac.kr
Received: 18 October 2017;  Accepted: 5 January 2018.  Published online: 6 March 2018.
ABSTRACT
Rhenium coatings were fabricated on a graphite substrate at 1100 and 1250 oC and a molybdenum substrate at 1150 and 1250 oC by chemical vapor deposition (CVD) using ReCl5 precursor, and the effects of deposition temperatures and substrates on microstructure and crystal orientation were investigated. The rhenium coating on graphite infiltrated the pores about hundred micrometers into the graphite, resulting in a large contact area between the coating and the graphite. However, the rhenium coating on molybdenum showed inferior adhesion, introducing voids and cracks in the Mo metal due to additional reactions between the precursor and Mo. As deposition temperature increased, rhenium grains on the graphite increasingly developed a preferred (0002) orientation normal to the coating, while on molybdenum they tended to develop other orientations, such as pyramidal and prism planes. These behaviors were discussed in relation to interfacial microstructure.
Keywords: coating, vapor deposition, rhenium, microstructure, texture
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