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Korean Journal of Metals and Materials > Volume 55(10); 2017 > Article
Korean Journal of Metals and Materials 2017;55(10): 739-744. doi: https://doi.org/10.3365/KJMM.2017.55.10.739
교번스퍼터링법에 의해 다양한 기지상 재료위에 형성된 Au 나노입자의 성장거동에 대한 전기, 광학적 분석
김범준1, 김현철1,2, 박종건3, 이경석1,2
1한국과학기술연구원 전자재료연구단
2과학기술연합대학원대학교 나노재료공학과
3광운대학교 전자재료공학과
Electrical and Optical Investigation of the Growth Behavior of Au Nanoparticles Fabricated on Various Matrix Materials by the Alternating Sputtering Method
Bum-Joon Kim1, Hyun Chul Kim1,2, Jong-Geon Park3, Kyeong-Seok Lee1,2
1Center for Electronic Materials, Korea Institute of Science and Technology, Seoul 02792, Republic of Korea
2Department of Electronic Materials Engineering Kwangwoon University, Seoul 01897, Republic of Korea
3Department of Nanomaterials and Engineering, Korea University of Science and Technology, Daejon 34113, Republic of Korea
Correspondence  Kyeong-Seok Lee ,Tel: +82-2-958-6734, Email: kslee21@kist.re.kr
Received: 16 May 2017;  Accepted: 17 June 2017.  Published online: 28 September 2017.
ABSTRACT
Nanocomposite films, which are comprised of metal nanoparticles dispersed in a matrix layer, have attracted great interest due to their unique electrical and optical properties, which are mainly due to the excitation of localized surface plasmons. In this study, we employed an alternating sputtering method to fabricate such nanocomposite films. We then systematically investigated the effect of SiO2, (Ba,Sr)TiO2, and Si matrix materials on the growth behavior of Au nanoparticles and their geometric distribution, which strongly affects their plasmonic properties, using both electrical and optical means. From the results, we suggest an effective way of monitoring the growth stages of Au nanoparticles and adjusting their geometric distribution to a desired form, by properly selecting the combination of materials and process controls.
Keywords: metal-dielectric nanocomposite film, alternating sputtering, localized surface plasmon resonance, growth of Au nanoparticles
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