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Korean Journal of Metals and Materials > Volume 55(8); 2017 > Article
Korean Journal of Metals and Materials 2017;55(8): 581-586. doi: https://doi.org/10.3365/KJMM.2017.55.8.581
Near Infrared Reflecting Properties of TiO2/Ag/TiO2 Multilayers Prepared by DC/RF Magnetron Sputtering
Sung Han Kim, Seo Han Kim, Pung Keun Song
Department of Materials Science and Engineering, Pusan National University, Pusan 46241, Republic of Korea
Correspondence  Pung Keun Song ,Tel: +82-51-510-3579, Email: pksong@pusan.ac.kr
Received: 20 December 2016;  Accepted: 14 March 2017.  Published online: 1 August 2017.
The near-infrared (NIR) reflecting properties of TiO2 /Ag /TiO2 (TAT) multilayers deposited using DC/RF magnetron sputtering were investigated. For high transmittance and reflectance in the visible and NIR ranges, respectively, the thickness of each layer was theoretically optimized by the index matching method. As the Ag layer thickness increased, the reflectance of the TAT multilayers in the NIR range increased significantly because of surface plasmon resonance (SPR). It was confirmed that the TAT multilayer with a 12 nm-thick Ag layer showed both good transmittance and reflectance. After irradiation with an IR lamp for 10 min, the temperature of the bare glass increased from 27 to 41 ℃, while that of the TAT films increased by only 6 ℃. This is because of the enhancement of the SPR effect with the increase in carrier density and mobility. The TAT multilayers were found to be suitable for NIR reflecting windows.
Keywords: NIR reflecting coating, energy saving, multilayer, O/M/O structure, sputtering
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