Investigation of the Mechanical/Thermal Properties of Nano-Scale Silicon Nitride Membranes
Yong Ju Jang, Hyeon-Jin Shin, Seong Ju Wi, Ha Neul Kim, Gi Sung Lee, Jinho Ahn
Korean J. Met. Mater.. 2019;57(2):124-129.   Published online 2019 Jan 9     DOI: https://doi.org/10.3365/KJMM.2019.57.2.124
Citations to this article as recorded by Crossref logo
Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography
Seong Ju Wi, Yong Ju Jang, Haneul Kim, Kyeongjae Cho, Jinho Ahn
Membranes.2022; 12(4): 367.     CrossRef
Low temperature silicon nitride grown by very high frequency (VHF, 162MHz) plasma enhanced atomic layer deposition with floating multi-tile electrode
You Jin Ji, Hae In Kim, Ki Hyun Kim, Ji Eun Kang, Doo San Kim, Ki Seok Kim, A.R. Ellingboe, Dong Woo Kim, Geun Young Yeom
Surfaces and Interfaces.2022; 33: 102219.     CrossRef