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Research Paper
Study on the Characteristics of Zn0.99Li0.01O Thin Film on Si Substrate by Sintering Temperatures
Gang Bae Kim and June Won Hyun

Received 2020 Jan 6     Accepted 2020 Mar 9     Published online 2020 Mar 11
Abstract
Lithium-doped zinc oxide (Zn0.99Li0.01O) film was manufactured by the sol-gel method using uniform and stable solution of zinc acetate dehydrate and lithium acetate dehydrate in methanol. Films were deposited by spin-coating using spinner between 4500 and 5000 rpm on silicon substrates. The prepared samples were sintered at various temperatures (600... More
      
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