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Enhanced Optical and Electrical Properties of Ti Doped In2O3 thin Films Treated by Post-deposition Electron Beam Irradiation
Su-Hyeon Choe, Yun-Je Park, Yu-Sung Kim, Byung-Chul Cha, Sung-Bo Heo, Sungook Yoon, Young-Min Kong, Daeil Kim
Korean J. Met. Mater. 2020;58(11):793-797.   Published online 2020 Oct 15
DOI: https://doi.org/10.3365/KJMM.2020.58.11.793

Abstract
Transparent and conductive Ti doped In2O3 (TIO) films were prepared on slide glass substrate using a radio frequency (RF) magnetron sputter and then subjected to Transparent and conductive Ti doped In2O3 (TIO) films were prepared on a glass slide substrate using radio frequency (RF) magnetron sputter. The film surface was..... More

                        
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