Korean J. Met. Mater.
2019;57(2):124-129. Published online 2019 Jan 9
In micro/nano electro-mechanical system, silicon nitride (SiNx) membrane has been widely used in sensors, energy harvesting and optical filters because of its mechanical/chemical stability. However, it is necessary to verify mechanical and thermal properties of nanoscale SiNx membranes to ensure the desirable reliability and durability of a device because the..... More