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Influence of Film Thickness on the Electrical and Optical Properties of ZnO/Ag/SnO<sub>2</sub> Tri-Layer Films
ZnO/Ag/SnO2 적층박막의 두께 변화에 따른 전기적, 광학적 특성 연구
Yu-Sung Kim, Jin-Young Choi, Yun-Je Park, Su-Hyeon Choe, Young-Min Kong, Daeil Kim
김유성, 최진영, 박윤제, 최수현, 공영민, 김대일
Korean J. Met. Mater. 2019;57(5):324-327.   Published online 2019 May 5
DOI: https://doi.org/10.3365/KJMM.2019.57.5.324

ZnO/Ag/SnO2 (ZAS) tri-layer films were prepared on glass substrates via RF and DC magnetron sputtering, and then the influence of the thickness of the ZnO and SnO2 layers on the optical and electrical properties of the ZAS films was investigated. As deposited ZnO 50 nm/Ag 10 nm/SnO2 50 nm films..... More

Enhancement of the Opto-Electrical Properties of Ag Intermediate ZTO Films by Vacuum Annealing
Hyun-Joo Moon, Daeil Kim
Korean J. Met. Mater. 2017;55(3):209-212.   Published online 2017 Mar 3
DOI: https://doi.org/10.3365/KJMM.2017.55.3.209

Sn-doped ZnO (ZTO)/Ag/ZTO tri-layer films were deposited on glass substrates by radio frequency (RF) and direct current (DC) magnetron sputtering and then vacuum annealed at 100, 200 and 300 ℃ for 30 min with a proportions of H2/N2 gas flow of 6/6 sccm, to investigate the effects of annealing temperature..... More

Study of Novel EUV AbsorberNickel & Nickel Oxide
새로운 EUV 흡수체 연구:니켈 & 니켈 산화물
Dong Gon Woo, Jung Hwan Kim, Jung Sik Kim, Seongchul Hong, Jinho Ahn
우동곤, 김정환, 김정식, 홍성철, 안진호
Korean J. Met. Mater. 2017;55(3):198-201.   Published online 2017 Mar 3
DOI: https://doi.org/10.3365/KJMM.2017.55.3.198
The shadowing effect is one of the most urgent issues yet to be solved in high-volume manufacturing using extreme ultraviolet lithography (EUVL). Many studies have been conducted to mitigate the unexpected results caused by shadowing effects. The simplest way to mitigate the shadowing effect is to reduce the thickness of... More
         Cited By 1
Material Analysis & Characterization
Effects of Doping Concentration on the Structural and Optical Properties of Spin-Coated In-doped ZnO Thin Films Grown on Thermally Oxidized ZnO Film/ZnO Buffer Layer/Mica Substrate
Byunggu Kim, Jae-Young Leem
Korean J. Met. Mater. 2017;55(1):67-71.   Published online 2017 Jan 5
DOI: https://doi.org/10.3365/KJMM.2017.55.1.67

ZnO buffer layers were deposited on mica substrates using a sol-gel spin coating method. Then, a thin film of metallic Zn was deposited onto the ZnO buffer layer/mica substrate using a thermal evaporator, and the deposited Zn thin films were then thermally oxidized in a furnace at 500 ℃ for..... More

         Cited By 1
Optical Devices & Energy Materials
Synthesis and Photoluminescence Studies of ZnO Films Using Vapor Phase Transport Combined With Rapid Heating
Iksoo Ji, Jae-Young Leem
Korean J. Met. Mater. 2016;54(8):609-614.   Published online 2016 Aug 5
DOI: https://doi.org/10.3365/KJMM.2016.54.8.609

The vapor phase transport (VPT) process is usually used for the growth of one-dimensional nanostructures rather than for film deposition. In this study, for the first time, we report on the fabrication and optical propeties of ZnO film produced by VPT combined with rapid heating. The X-ray diffraction results showed..... More

Electronic Materials
Enhanced Optical and Electrical Properties of TiO<sub>2</sub> Buffered IGZO/TiO<sub>2</sub> Bi-Layered Films
Hyun-Joo Moon, Daeil Kim
Korean J. Met. Mater. 2016;54(8):605-608.   Published online 2016 Aug 5
DOI: https://doi.org/10.3365/KJMM.2016.54.8.605

In and Ga doped ZnO (IGZO, 100-nm thick) thin films were deposited by radio frequency magnetron sputtering without intentional substrate heating on a bare glass substrate and a TiO2-deposited glass substrate to determine the effect of the thickness of a thin TiO2 buffer layer on the structural, optical, and electrical..... More

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