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Korean J. Met. Mater.
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Korean Journal of Metals and Materials
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ZnO/Ag/SnO
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적층박막의 두께 변화에 따른 전기적, 광학적 특성 연구
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김유성, 최진영, 박윤제, 최수현, 공영민, 김대일
Korean J. Met. Mater.
2019;57(5):324-327. Published online 2019 May 5
DOI:
https://doi.org/10.3365/KJMM.2019.57.5.324
Abstract
ZnO/Ag/SnO2 (ZAS) tri-layer films were prepared on glass substrates via RF and DC magnetron sputtering, and then the influence of the thickness of the ZnO and SnO2 layers on the optical and electrical properties of the ZAS films was investigated. As deposited ZnO 50 nm/Ag 10 nm/SnO2 50 nm films.....
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Web of Science 6
Crossref 7
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Korean J. Met. Mater.
2017;55(3):209-212. Published online 2017 Mar 3
DOI:
https://doi.org/10.3365/KJMM.2017.55.3.209
Abstract
Sn-doped ZnO (ZTO)/Ag/ZTO tri-layer films were deposited on glass substrates by radio frequency (RF) and direct current (DC) magnetron sputtering and then vacuum annealed at 100, 200 and 300 ℃ for 30 min with a proportions of H
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gas flow of 6/6 sccm, to investigate the effects of annealing temperature.....
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새로운 EUV 흡수체 연구：니켈 & 니켈 산화물
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우동곤, 김정환, 김정식, 홍성철, 안진호
Korean J. Met. Mater.
2017;55(3):198-201. Published online 2017 Mar 3
DOI:
https://doi.org/10.3365/KJMM.2017.55.3.198
Abstract
The shadowing effect is one of the most urgent issues yet to be solved in high-volume manufacturing using extreme ultraviolet lithography (EUVL). Many studies have been conducted to mitigate the unexpected results caused by shadowing effects. The simplest way to mitigate the shadowing effect is to reduce the thickness of...
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Crossref 1
Material Analysis & Characterization
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Korean J. Met. Mater.
2017;55(1):67-71. Published online 2017 Jan 5
DOI:
https://doi.org/10.3365/KJMM.2017.55.1.67
Abstract
ZnO buffer layers were deposited on mica substrates using a sol-gel spin coating method. Then, a thin film of metallic Zn was deposited onto the ZnO buffer layer/mica substrate using a thermal evaporator, and the deposited Zn thin films were then thermally oxidized in a furnace at 500 ℃ for.....
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Optical Devices & Energy Materials
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Korean J. Met. Mater.
2016;54(8):609-614. Published online 2016 Aug 5
DOI:
https://doi.org/10.3365/KJMM.2016.54.8.609
Abstract
The vapor phase transport (VPT) process is usually used for the growth of one-dimensional nanostructures rather than for film deposition. In this study, for the first time, we report on the fabrication and optical propeties of ZnO film produced by VPT combined with rapid heating. The X-ray diffraction results showed.....
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Crossref 1
Electronic Materials
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Korean J. Met. Mater.
2016;54(8):605-608. Published online 2016 Aug 5
DOI:
https://doi.org/10.3365/KJMM.2016.54.8.605
Abstract
In and Ga doped ZnO (IGZO, 100-nm thick) thin films were deposited by radio frequency magnetron sputtering without intentional substrate heating on a bare glass substrate and a TiO
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-deposited glass substrate to determine the effect of the thickness of a thin TiO
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buffer layer on the structural, optical, and electrical.....
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Crossref 1
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