| Home | E-Submission/Review | Sitemap | Editorial Office |  
top_img
Korean Journal of Metals and Materials Search > Browse Articles > Search



Adsorption and Recovery using Vaporization of Liquid Fluorocarbon Precursor
액상플루오르카본전구체(Liquid Fluorocarbon Precursor)의 기화를 이용한 흡착 및 회수
Junyoung Park, Byoungmoon Oh, Kyongnam Kim
박준영, 오병문, 김경남
Korean J. Met. Mater. 2020;58(6):397-402.   Published online 2020 May 14
DOI: https://doi.org/10.3365/KJMM.2020.58.6.397

Abstract
PFC gas is primarily used during the etching process in the manufacture of ULSIs and in cleaning after CVD processes. PFC is classified as a greenhouse gas that stays in the atmosphere for a long time and has a high GWP. High capacity and high integration have been achieved in..... More

                        
1 |
E-Submission
Email Alert
Author's Index
Specialties
Impact factor
The Korean Institute of Metals and Materials
SCImago Journal & Country Rank
Scopus
GoogleScholar
Similarity Check
Crossref Cited-by Linking
KOFST
COPE
Editorial Office
The Korean Institute of Metals and Materials
6th Fl., Seocho-daero 56-gil 38, Seocho-gu, Seoul 06633, Korea
TEL: +82-2-557-1071   FAX: +82-2-557-1080   E-mail: metal@kim.or.kr
About |  Browse Articles |  Current Issue |  For Authors and Reviewers
Copyright © The Korean Institute of Metals and Materials. All rights reserved.                 Developed in M2Community