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액상플루오르카본전구체(Liquid Fluorocarbon Precursor)의 기화를 이용한 흡착 및 회수
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박준영, 오병문, 김경남
Korean J. Met. Mater.
2020;58(6):397-402. Published online 2020 May 14
DOI:
https://doi.org/10.3365/KJMM.2020.58.6.397
Abstract
PFC gas is primarily used during the etching process in the manufacture of ULSIs and in cleaning after CVD processes. PFC is classified as a greenhouse gas that stays in the atmosphere for a long time and has a high GWP. High capacity and high integration have been achieved in.....
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