Abstract
In micro/nano electro-mechanical system, silicon nitride (SiNx) membrane has been widely used in sensors, energy harvesting and optical filters because of its mechanical/chemical stability. However, it is necessary to verify mechanical and thermal properties of nanoscale SiNx membranes to ensure the desirable reliability and durability of a device because the..... More

Abstract
The missing hole phenomenon in a wafer pattern is a critical issue in extreme ultraviolet lithography. It occurs randomly, even when the process conditions are consistent. The main reason for this phenomenon is thought to be the photon shot noise effect, which is a random reaction between photons and photoresist..... More