Hae-In Hwang, Suyeon Kim, In-Ho Jo, Seung-Hun Lee, Ahyun Park, Jeong Hwan Kim황해인, 김수연, 조인호, 이승훈, 박아현, 김정환
Korean J. Met. Mater. 2024;62(9):740-747. Published online 2024 Sep 5
DOI:
https://doi.org/10.3365/KJMM.2024.62.9.740
Abstract
The semiconductor and display industries employ microfabrication and high-density technology to enhance the performance of IT products. Current micro-patterning methods primarily rely on photolithography. However, photolithography is a complex and expensive process, with limited freedom of pattern design, and involves dry etching methods that use toxic substances, which are harmful.....
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