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In-Ho Jo 1 Article
740 Influence of Rapid Thermal Processing on the Machining Properties of Copper Thin Films for Nano/Micro Pattern Fabrication
나노/마이크로 패턴 제작을 위한 급속열처리가 구리 박막의 기계 가공 특성에 미치는 영향
Hae-In Hwang, Suyeon Kim, In-Ho Jo, Seung-Hun Lee, Ahyun Park, Jeong Hwan Kim
황해인, 김수연, 조인호, 이승훈, 박아현, 김정환
Korean J. Met. Mater. 2024;62(9):740-747.   Published online 2024 Sep 5
DOI: https://doi.org/10.3365/KJMM.2024.62.9.740

Abstract
The semiconductor and display industries employ microfabrication and high-density technology to enhance the performance of IT products. Current micro-patterning methods primarily rely on photolithography. However, photolithography is a complex and expensive process, with limited freedom of pattern design, and involves dry etching methods that use toxic substances, which are harmful..... More

                
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