Korean J. Met. Mater. 2020;58(1):26-31. Published online 2019 Dec 12
DOI:
https://doi.org/10.3365/KJMM.2020.58.1.26
Abstract
The ability to form high quality nano-/micro- patterns is very important for the nanofabrication of high-density electronic devices. However, remaining challenges have yet to be resolved, including low quality roughness, low pattern resolution, and the highly complex process. In this study, we suggest a novel and simple method for creating.....
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