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Gi Sung Lee 1 Article
124 Investigation of the Mechanical/Thermal Properties of Nano-Scale Silicon Nitride Membranes
나노스케일 질화규소 멤브레인의 기계적, 열적 특성 분석
Yong Ju Jang, Hyeon-Jin Shin, Seong Ju Wi, Ha Neul Kim, Gi Sung Lee, Jinho Ahn
장용주, 신현진, 위성주, 김하늘, 이기성, 안진호
Korean J. Met. Mater. 2019;57(2):124-129.   Published online 2019 Jan 9
DOI: https://doi.org/10.3365/KJMM.2019.57.2.124

Abstract
In micro/nano electro-mechanical system, silicon nitride (SiNx) membrane has been widely used in sensors, energy harvesting and optical filters because of its mechanical/chemical stability. However, it is necessary to verify mechanical and thermal properties of nanoscale SiNx membranes to ensure the desirable reliability and durability of a device because the..... More

                        
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